微机械元件和仪器新进展*(2)
2017-09-17 01:56
导读：changchun institute of and optics and fine mechanics wang li-ding ren yan-tongabstract mems component and instrument are suitable for batch manufacture and have the advantage of low price, high reliab
changchun institute of and optics and fine mechanics wang li-ding ren yan-tongabstract mems component and instrument are suitable for batch manufacture and have the advantage of low price, high reliability, smaller volume and large-scale integration. in this decade a great progress has been made in the research, development and marketing of this field, which suggests a bright future. *国家863计划、辽宁省博士起动基金、博士后基金资助项目作者简介:邵培革, 男, 1964年生人, 1996年于哈尔滨产业大学获博士学位，现为大连理工大学机械系博士后，已发表学术论文十余篇。王立鼎，男,中国科学院院士。
