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全部作者: 赖秀琼 陈俊芳 Silie Fu Wei Li Maoping Zhang Lei Shi Chunlin Yang 第1作者单位: 华南师范大学 摘要: The spatial plasma density distribution in the reaction chamber of the quartz tube microwave plasma apparatus is diagnosed at p = 1.20 kpa, Pw = 440W by a Langmuir probe, obtaining the biggest plasma density 1.05×1012/cm3. Also, the plasma density under different discharge gas pressure and power is diagnosed. Diamond-like carbon films are achieved at p = 6.8kPa, Pw = 680W with CH4 flow rate being 6ml/min and H2 flow rate being 200ml/min and detected by AFM, Raman spectroscopy instrument and profiler. 关键词: Langmuir probe; Diamond-like carbon thin films (浏览全文) 发表日期: 2006年11月07日 同行评议:
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