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氮掺杂对DLC的表面形貌与光学性能的影响
摘要：本采用直流磁控溅射，以Ar或Ar与N2为工作气体溅射高纯石墨靶材制备了DLC及DLC:N薄膜。通过改变溅射功率，沉积气压和和工作气体等实验参数，以使得到的碳膜呈现出不同的表面形貌和性能；采用AFM、AES、FTIR、UV-VIS、椭偏仪等现代化测试手段，通过对薄膜宏观和微观结构的分析，研究了制备工艺对DLC薄膜光学，以及电子化学键结构的影响,采用俄歇电子能谱CKLL的dN(E)/E计算了DLC及DLC:N薄膜的sp2和 sp3的组分比率，得到以下结果：
（1）俄歇电子能谱AES 中, CKLL 俄歇谱可以用作表面碳的形式的指纹鉴别,用CKLL 俄歇谱和其价带谱分析表征表明所制备氢化薄膜表面具有类金刚石4面体sp3价键结构。
(2) 随这工作气体中氮气含量的增加，薄膜的表面形貌变差，折射率变小, 而光学带隙先增大后减小; 俄歇电子能谱(AES)表征表明，1定量的氮的掺入稳定了sp2键的形成。
关键词：DLC薄膜；氮掺杂；俄歇电子能谱；电子结构；光学带隙；sp2键与sp3键比率
The effect of nitrogen doping on the opictical properties of diamond-like carbon
Abstract：Diamond-like carbon(DLC) films and DLC:N were prepared by DC reactive magnetron sputtering Ar or Ar and N2 as source gases separately, and pure graphite as a target . Based on this, different surface morphology and property of diamond like carbon films was deposited by controlling the deposition pressure,ambient pressure sputtering powers ，working gas and so on. The films studied by AFM,AES, UV-VIS, FTIRand ellipsometer to investigate property and electron structure of Diamond-like carbon films. Following conclusions can be made: （科教作文网http://zw.NSEaC.com编辑发布）
(1) The Auger electron spectroscopy( AES)CKLL can reflect electronic structure of DLC films.DLC films deposited by DC sputtering of graphite in hydrogen have a diamond-like tetrahedral C-C bonding configuration as evidence by the fact that both the( AES)CKLL and the valence-band spectra are the same as for natural diamond.
(2) The results showed that the optical band gap first decreased and then increased with the increasing of N2 gas source. The refractive index changed in reverse order. the optical band gap and the refractive index reduced. It demonstrated that Nitrogen doping thin fims were benefited for formation of sp2 hybrid bonds and make optical band gap of thin film decreased .
Keyword：Diamond-like carbon films; nitrogen doping; AES;electronic structure;optical band gap; the ratio of sp2 and sp3
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